Academic Commons

Theses Doctoral

Precision Tuning of Silicon Nanophotonic Devices through Post-Fabrication Processes

Chen, Charlton J.

This thesis investigates ways of improving the performance of fundamental silicon nanophotonic devices through post-fabrication processes. These devices include numerous optical resonator designs as well as slow-light waveguides. Optical resonators are used to confine photons both spatially and temporally. In recent years, there has been much research, both theoretical and experimental, into improving the design of optical resonators. Improving these devices through fabrication processes has generally been less studied. Optical waveguides are used to guide the flow of photons over chip-level distances. Slow-light waveguides have also been studied by many research groups in recent years and can applied to an increasingly wide-range of applications. The work can be divided into several parts: Chapter 1 is an introduction to the field of silicon photonics as well as an overview of the fabrication, experimental and computational techniques used throughout this work. Chapters 2, 3 and 4 describe our investigations into the precision tuning of nanophotonic devices using laser-assisted oxidation and atomic layer deposition. Chapters 5 and 6 describe our investigations into improving the sidewall roughness of silicon photonic devices using hydrogen annealing and excimer laser induced melting. Finally, Chapter 7 describes our investigations into the nonlinear properties of lead chalcogenide nanocrystals.

Files

  • thumnail for Chen_columbia_0054D_10140.pdf Chen_columbia_0054D_10140.pdf application/pdf 19.1 MB Download File

More About This Work

Academic Units
Applied Physics and Applied Mathematics
Thesis Advisors
Wong, Chee Wei
Im, James Sungbin
Degree
Ph.D., Columbia University
Published Here
May 5, 2011
Academic Commons provides global access to research and scholarship produced at Columbia University, Barnard College, Teachers College, Union Theological Seminary and Jewish Theological Seminary. Academic Commons is managed by the Columbia University Libraries.