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1 Double Exposure Materials: Simulation Study of Feasibility

Author(s):
Byers, Jeffrey; Lee, Saul; Jen, Kane; Zimmerman, Paul; Turro, Nicholas J.; Willson, C. Grant
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9357

2 Methods for the synthesis and purification of polycycloalkane candidates for photolithography immersion fluids at 193 nm: requirements for removal of oxygen

Author(s):
López-Gejo, Juan; Kunjappu, Joy T.; Conley, Will; Zimmerman, Paul; Turro, Nicholas J.
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9359

3 Outlook for potential third-generation immersion fluids

Author(s):
López-Gejo, Juan; Kunjappu, Joy T.; Zhou, J.; Smith, Bruce W.; Zimmerman, Paul; Conley, Will; Turro, Nicholas J.
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9352

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