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1 Degradation of Hydrocarbon Fluids in the Immersion Lithography at 193 nm

Author(s):
O'Connor, Naphtali A.; Liberman, Vladimir; Lei, Xuegong; López-Gejo, Juan; Turro, Nicholas J.; Zimmerman, Paul A.
Date:
2008
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9355

2 Development and Evaluation of a 193nm Immersion Generation-Three Fluid Candidates

Author(s):
Zimmerman, Paul A.; Byers, Jeff; Rice, Bryan; Ober, Christopher K.; Giannelis, Emmanuel P.; Rodriguez, Robert; Wang, Dongyan; O'Connor, Naphtali; Lei, Xuegong; Turro, Nicholas J.; Liberman, Vladimir; Palmacci, Stephen; Rothschild, Mordechai; Lafferty, Neal; Smith, Bruce W.
Date:
2008
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9350

3 Status of High-Index Materials for Generation-Three 193nm Immersion Lithography

Author(s):
Zimmerman, Paul A.; Peski, Chris van; Rice, Bryan; Byers, Jeff; Turro, Nicholas J.; Lei, Xuegong; López-Gejo, Juan; Liberman, Vladimir; Palmacci, Steve; Rothchild, Mordy; Whitker, Andrew; Blakey, Idriss; Chen, Lan; Dargaville, Bronwin; Liu, Heping
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9356

4 In situ EPR investigation of the addition of persistent benzyl radicals to acrylates on ZSM-5 zeolites. Direct spectroscopic detection of the initial steps in a supramolecular photopolymerization

Author(s):
Lei, Xuegong; Jockusch, Steffen; Ottaviani, M. Francesca; Turro, Nicholas J.
Date:
2003
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9361

5 Photochemistry and magnetic resonance spectroscopy as probes of supramolecular structures and migration pathways of organic molecules and radicals adsorbed on zeolites

Author(s):
Turro, Nicholas J.; Lei, Xuegong; Li, Wei; McDermott, Ann E.; Abrams, Lloyd; Ottavianai, M. Francesca; Beard, Hege Støgård
Date:
1998
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9387

6 Photochemistry of ketones adsorbed on size/shape selective zeolites. A supramolecular approach to persistent carbon centered radicals

Author(s):
Turro, Nicholas J.; McDermott, Ann; Lei, Xuegong; Li, Wei; Abrams, Lloyd; Ottavianai, M. Francesca; Beard, Hege Støgård; Houk, Kendall N.; Beno, Brett R.; Lee, Patrick S.
Date:
1998
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9388

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