1. Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection Souhan, Brian; Chen, Christine P.; Lu, Ming; Stein, Aaron; Bakhru, Hassaram; Grote, Richard; Bergman, Keren; Green, William M. J.; Osgood Jr., Richard M. 2016 Articles PhotonicsOptical detectorsIntegrated optics