Start Search Over

Active Search Criteria:

Displaying items 1 - 10 of 11
sorted by

1 Adiabatic ring opening in tethered naphthalene and anthracene cycloadducts

Author(s):
Sundaresan, Arun K.; Jockusch, Steffen; Li, Yongjun; Lancaster, Jeffrey R.; Banik, Steven; Zimmerman, Paul; Blackwell, James M.; Bristol, Robert; Turro, Nicholas J.
Date:
2010
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9398

2 A New Materials-based Pitch Division Technique

Author(s):
Gu, Xinyu; Bates, Christopher; Cho, Younjin; Costner, Elizabeth; Marzuka, Fernando; Nagai, Tomoki; Ogata, Toshiyuki; Shi, Chuan; Sundaresan, Arun K.; Turro, Nicholas J.; Bristol, Robert; Zimmerman, Paul; Willson, C. Grant
Date:
2009
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9397

3 Methods for the synthesis and purification of polycycloalkane candidates for photolithography immersion fluids at 193 nm: requirements for removal of oxygen

Author(s):
López-Gejo, Juan; Kunjappu, Joy T.; Conley, Will; Zimmerman, Paul; Turro, Nicholas J.
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9359

4 Double Exposure Materials: Simulation Study of Feasibility

Author(s):
Byers, Jeffrey; Lee, Saul; Jen, Kane; Zimmerman, Paul; Turro, Nicholas J.; Willson, C. Grant
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9357

5 157 nm Pellicles for Photolithography: Mechanistic Investigation of the Deep UV Photolysis of Fluorocarbons

Author(s):
Lee, Kwangjoo; Jockusch, Steffen; Turro, Nicholas J.; French, Roger H.; Wheland, Robert C.; Lemon, Michael F.; Braun, Andre M.; Widerschpan, Tatjana; Zimmerman, Paul
Date:
2004
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9354

6 Amplification of the Index of Refraction of Aqueous Immersion Fluids by Ionic Surfactants

Author(s):
Lee, Kwangjoo; Kunjappu, Joy T.; Jockusch, Steffen; Turro, Nicholas J.; Widerschpan, Tatjana; Zhou, Jianming; Smith, Bruce W.; Zimmerman, Paul; Conley, Will
Date:
2005
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9353

7 Outlook for potential third-generation immersion fluids

Author(s):
López-Gejo, Juan; Kunjappu, Joy T.; Zhou, J.; Smith, Bruce W.; Zimmerman, Paul; Conley, Will; Turro, Nicholas J.
Date:
2007
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9352

8 An analysis of double exposure lithography options

Author(s):
Lee, Saul; Byers, Jeffrey; Jen, Kane; Zimmerman, Paul; Rice, Bryan; Turro, Nicholas J.; Willson, C. Grant
Date:
2008
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9351

9 Optical Threshold Layer and Intermediate State Two-Photon PAG Approaches to Double Exposure Lithography

Author(s):
Berro, Adam J.; Gu, Xinyu; O'Connor, Naphtali; Jockusch, Steffen; Nagai, Tomoki; Ogata, Toshiyuki; Zimmerman, Paul; Rice, Bryan J.; Adolph, Elizabeth; Byargeon, Travis; Gonzalez, Jose; Turro, Nicholas J.; Willson, C. Grant
Date:
2009
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9349

10 Fundamental Study of Optical Threshold Layer Approach Towards Double Exposure Lithography

Author(s):
Gu, Xinyu; Berro, Adam J.; Cho, Younjin; Jen, Kane; Lee, Saul; Nagai, Tomoki; Ogata, Toshiyuki; Durand, William J.; Sundaresan, Arun K.; Lancaster, Jeffrey R.; Jockusch, Steffen; Zimmerman, Paul; Turro, Nicholas J.; Willson, C. Grant
Date:
2009
Subject:
Chemistry
Content Type:
Articles
Permanent URL:
http://hdl.handle.net/10022/AC:P:9348

Powered by the Center for Digital Research and Scholarship at Columbia University Libraries/Information Services.